We have decades of experience with coating systems and can provide the ideal vacuum solution for each type of coating process. Whether fast evacuation of load-locks is required or high performance process pumping in the high vacuum region, we have the right range of product technology configured to your needs.
Vacuum Coating processes involve providing fast pump-down of
main loading chambers to a certain degree of pressure using roughing vacuum
pumps combined with high displacement blowers. The following stages involve
providing high vacuum pumping of the chamber with injection of process gases
that then have to be pumped out while ensuring stable and uniform coating on
the substrates. There are several coating applications, including:
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