• Air Pollution Control Equipment

    We are the world leader in Exhaust Management Solutions. Our goals lie far beyond the destruction of toxic and global warming gases, which impact our environment.

    We are application experts who understand our customers’ processes, and develop solutions focused on maintaining productivity and lowering risk. Serving all leading process tool OEMs, and with a presence at every major semiconductor fab in the world, our products are designed to meet the specific requirements of existing and developing processes.

    Our solutions will improve your process up-time, yield, throughput and safety compliance whilst striving to balance the often conflicting requirements of lower cost of ownership through reduced environmental emission and extended product lifetimes with a reduction in on-going service costs.

         

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  • ATLAS
    SPECTRA
  • Our History

    When F.D. Edwards began manufacturing vacuum equipment in 1939, he made a commitment to technical innovation that remains solidly at the heart of what we do today.

    Learn More about Our History

  • Product Documentation

    Learn more about our Exhaust Management product offerings...

    Exhaust Management Solutions Brochure

  • FabWorks-iMS Monitoring

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    Edwards offers the FabWorks Intelligent Monitoring System, a complete condition monitoring and analysis system for vacuum and exhaust management equipment.

    Learn More about FabWorks