We are the world leader in Exhaust Management Solutions. Our goals lie far beyond the destruction of toxic and global warming gases, which impact our environment.
We are application experts who understand our customers’ processes, and develop solutions focused on maintaining productivity and lowering risk. Serving all leading process tool OEMs, and with a presence at every major semiconductor fab in the world, our products are designed to meet the specific requirements of existing and developing processes.
Our solutions will improve your process up-time, yield, throughput and safety compliance whilst striving to balance the often conflicting requirements of lower cost of ownership through reduced environmental emission and extended product lifetimes with a reduction in on-going service costs.
Atlas Series for the Semiconductor, Flat Panel Display, Photovoltaic & LED markets.
Spectra Series for the Flat Panel Display, Photovoltaic & LED markets.
Discover what makes us different...Corporate Responsibility ReportEdwards ISO/OHSAS CertificatesEdwards Leadership TeamVacuum Safety Booklet
When F.D. Edwards began manufacturing vacuum equipment in 1939, he made a commitment to technical innovation that remains solidly at the heart of what we do today.
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Learn more about our Exhaust Management product offerings...
Exhaust Management Solutions Brochure
Edwards has obsoleted all FabWorks and pre-FabWorks Equipment Monitoring products on January 15, 2017
Learn more about FabWorks Obsolescence