The Spectra-Z is a high capacity combustion system that provides reliable, high performance and cost effective abatement of hazardous gases from solar cell processes that use large flows of silane (SiH₄). The Spectra-Z employs 4-stage combustion, and can be configured with up to six process gas inlets. The Spectra-Z has low CoO and requires no water or oxygen facilities.

• Applications include: PECVD a-Si/µ-Si deposition, LPCVD
• Gases abated: SiH₄, PH₃, NH₃, TMB, NF₃
• Capacity: 800 slm and 3,000 slm

XDS35i: Completely Dry Scroll Pump for Semiconductor Applications
For those clean duty semiconductor applications, such as scanning electron microscopy (SEM), the XDS35i would be ideal. The bearings are isolated from the vacuum environment by a patented XDS bearing shield. Uniquely, there are no bearings, grease or oil under vacuum. Controllable gas ballast is standard and makes the XDS35i ideal for pumping vapors. The pump is driven from single-phase power with an inverter to control the motor speed. This provides the user remote control and constant pumping speed (35 m/hr or 21 cfm) on either 50 or 60Hz frequencies. Power consumption is very low and typically no other utilities are required. The XDS is truly user serviceable - with no oil to change, annual maintenance can be completed in about 20 minutes without special tools.

• Totally dry – no oil or grease in the pump mechanism
• Easy to maintain – no major service for 3 years
• Compact footprint, clean pumping, quiet operation (57 db(A))
• High ultimate vacuum
• Environmentally friendly

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iTCU Temperature Control Unit
The iTCU is Edwards next generation temperature control unit for etch, ash and other semiconductor applications. It offers improvements in dynamic temperature control, cost of ownership and ease of use over previous product generations.