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| Semiconductor Industry News |
Vacuum Coating Processes: Recent Experiences in Increasing Process Efficiency and Reducing Environmental Impact
By Andreas Tengler, Edwards, as presented at the Vacuum Technology and Coating Expo, October 2007
Coating processes in contemporary solar cell manufacturing generate harmful byproducts that cannot be disposed of without appropriate treatment. Edwards can handle these exhaust gases and instead of a ‘one fits all’ approach, Edwards provides tailored solutions. |
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Has the Challenge of PFCs Really Been Solved?
By M.R. Czerniak and Kirel Tang, Edwards and Shou-Nan Li, ITRI, as printed in the October issue of Semiconductor International
Many people thought that the introduction of NF3 cleaning gas for CVD chambers had solved the industry’s biggest global warming challenge, but this may not be the whole story. Some exhaust gas treatment systems use “open flame” combustion to treat the waste gases from these processes, but these pose a new issue: they actually generate CF4 where none existed before. Fortunately there is a reliable solution to CVD abatement that does not suffer from this fundamental flaw: inward fired combustion. |
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Energy Conservation with Edwards Products
As presented by Dr. Joe Van Gompel and Gerry Bergeron, Edwards at the Sematech ISMI conference, October 2007
Edwards has taken a leadership role in the conservation of power and other utilities used in the operation of vacuum drypumps and process abatement devices. Our design engineers consider many facets that will lower the cost of operation of our equipment including advanced motor controls, optimized mechanical designs and adapting operational parameters to the changing process environment. |
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Solar Industry News |
Updated Brochure: Equipment and Services for Solar
Edwards is the only manufacturer that can supply solar cell producers worldwide with a broad range of vacuum and turbo pumps, exhaust management, liquid abatement, wet cleaning/etching equipment and chemical management systems. Our global service network ensures that you have local support around the world.
Visit our solar web page to learn more. |
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| Product News |
| New Turbo Datasheet |
The STP-XA4503C magnetic bearing turbomolecular pump series has a wide process window, from high vacuum, to high flow requirements with enhanced throughput for all gases. |
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Atlas™ Gas Abatement Systems
Edwards is pleased to announce the release of the Atlas product line. Incorporating the field proven features of the Alzeta inward-fired combustors that Edwards has provided for over 10 years, the Atlas-TPU, Atlas-TCS and Atlas-Kronis offer significantly reduced fuel and process cooling water consumption, an improved user interface and a design optimized for ease of maintenance. |
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Edwards is attending several industry events. Click here to view the upcoming dates and locations.
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Edwards also offers a bimonthly e-newsletter for the scientific instruments, R&D, laboratory, industrial and process vacuum markets called Vacuum pArticles.
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A significant improvement to the Edwards website is the integration of online shopping into the same page as product information.
Ordering products is merged into one site and easy to place an order online. |
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