The iGX dry vacuum pump series sets new
standards for the modern dry pump with zero maintenance between overhauls; this has led to it being one of the world’s most popular dry pumps with over 20,000 units installed in most leading 300mm fabs. iGX range includes both MicroTIM tool interfacing and Ethernet connectivity allowing key data to be viewed via web
pages, as well as a comprehensive set of networking options, to assure continuous pump availability.
iGX pumps are available in a wide range of peak speeds and variants to address applications from clean through to medium-duty processes. A modular design allows users to configure iGX dry pump to suit individual fab requirements. A compact footprint allows installation
options including on-tool, close proximity, or remote operation.
Typically a 40%*saving can be made on utilities costs over an entire fab by utilising iGX dry pump technologies (compared to iL/iH dry pumps).
on a 300mm fab in the US, containing 200 tools, 537 pumps / 70% iGX pumps, 30%
iH pumps/iGX fitted with constant flow water valve.
Target applications include:
Customers also use iGX for a range of
clean and light duty applications.
Discover what makes us different...Corporate PresentationCorporate Responsibility ReportEdwards ISO/OHSAS CertificatesEdwards Leadership TeamVacuum Safety Booklet
When F.D. Edwards began manufacturing vacuum equipment in 1939, he made a commitment to technical innovation that remains solidly at the heart of what we do today.
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Learn more about the iGX product line...
iGX Dry Pumps Product Brochure
Edwards offers the FabWorks Intelligent Monitoring System, a complete condition monitoring and analysis system for vacuum and exhaust management equipment.
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