Effective exhaust management of CVD processes must be able to handle the deposition gases and the associated powders. The fluoride wastes from cleaning gases also require suitable treatment along with global warming gases. Abatement systems must be able to comply with these requirements in one complete unit.
Exhaust Management Challenges
Alternating high flows of hydrogen with additional toxic and pyrophoric gases followed by acid vapours presents a new challenge for exhaust treatment in basic burners. The variation in flows of hydrogen can severely limit both the efficiency and cleanliness of combustion. The Atlas Helios is a new generation of Edwards’ inward fired combustors that is capable of high performance with these processes, combined with a clean combustion process.
- Si Epitaxy
- III-V MOCVD
- SiGe Epitaxy
Zenith CVD and Zenith EPI
Wet Electro-static Precipitator (WESP)
Temperature Management System (TMS)