Effective exhaust management of CVD processes must be able to handle the deposition gases and the associated powders. The fluoride wastes from cleaning gases also require suitable treatment along with global warming gases. Abatement systems must be able to comply with these requirements in one complete unit.

Exhaust Management Challenges
 
Alternating high flows of hydrogen with additional toxic and pyrophoric gases followed by acid vapours presents a new challenge for exhaust treatment in basic burners. The variation in flows of hydrogen can severely limit both the efficiency and cleanliness of combustion. The Atlas Helios is a new generation of Edwards’ inward fired combustors that is capable of high performance with these processes, combined with a clean combustion process.

• Si Epitaxy
• III-V MOCVD
• SiGe Epitaxy

• Proven high abatement performance for toxic, pyrophoric & corrosive gases
• Reliable handling of associated powders
• Controlled and complete oxidation of hydrogen to safe limits
• Capable of handling up to 200 lpm of hydrogen
• Up to 4 process inlets

Process connections
Process gas inlets	NW40 stainless steel
Bypass outlet	NW40 stainless steel
Abatement system exhaust outlet	75 mm diameter polypropylene
Cabinet extraction outlet	150 mm diameter x 150 mm deep, painted mild steel
Services connections
Nitrogen inlet	1/2 inch Swagelok, stainless steel
Oxygen inlet	1/4 inch Swagelok, stainless steel
Compressed dry air inlet	1/4 inch Swagelok, stainless steel
Fuel gas inlet	3/4 inch Swagelok, stainless steel
Cooling-water supply inlet	25 mm GF union, polypropylene
Cooling-water return outlet	25 mm GF union, polypropylene
Make-up water inlet	25 mm GF union, polypropylene
Acid water drain outlet	25 mm GF union, polypropylene
Electrical connections
Electrical supply cable leadthrough	32 mm cable-gland, suitable for 5-core double insulated cable
Customer interface cable leadthroughs	16 mm cable-glands
Customer interface connections	Screw terminals
Power Requirements
Supply	3-phase 400,220,208,200V, 50/60Hz 1-phase 100V, 50/60Hz
Nominal power requirements	1.3kW
Mechanical Data
Mass	530kg
	101.5kg (WRU E Model)
	103.5kg (WRU S J Models)