Edwards Enables - Forensics

We all enjoy detective stories, and nowadays forensic analysis always features. Scientific instruments and specialised coaters with built in vacuum pumps are what really makes tracking criminals possible…

Exhaust Management Systems

Integrated Vacuum and Exhaust Management

Integrated Vacuum and Exhaust Management

The Zenith range is a ground breaking series of process-specific combined vacuum and exhaust management systems, providing enhanced safety, process tool compatibility, minimum footprint and reduced cost of ownership. Developed in cooperation with the OEMs to assure appropriate pumping and abatement solutions, a centralized control strategy allows for energy conservation through Active Utility Control. As a single extracted cabinet with single utility connection Zenith represents the most cost-effective method of providing protection in the event of leakage as only one extraction connection is required compared to multiple enclosures. Other benefits include lower installation costs, shorter installation time and full compliance to national and international electrical and safety standards and SEMI® S2-0303.

Inward Fired Combustors

Inward Fired Combustors

Atlas™ from Edwards: the range of combustion gas abatement solutions that offers semiconductor manufacturers reduced operating costs and enhanced ease-of-use.

Atlas™ systems have low fuel consumption compared with previous-generation gas abatement devices and utilize proven Alzeta™ inward-fired combustor technology to achieve significantly reduced costs of ownership. With one to six inlets with a number of options, including a temperature management system (TMS), they can reach a flow capacity of up to 600 slm and they offer enhanced ease-of-use and more efficient maintenance.

Electrically Fired Thermal Processing

Electrically Fired Thermal Processing

Edwards offers electrically-heated oxidation systems for the removal of pyrophoric and acidic gases commonly found in semiconductor applications.

Spectra Series

Spectra Series

The Spectra series is a cost effective, reliable, high performance exhaust treatment solution for the latest generation Flat Panel Display (FPD), Solar and MOCVD manufacturing processes.

Gas Reactor Column (GRC) Series

Gas Reactor Column (GRC) Series

Edwards offers a range of low-cost, point of use dry abatement systems for semiconductor processing. Each system uses the unique hot bed reactor technology developed for the GRC (Gas Reactor Column) range.

Wet Scrubbers

Wet Scrubbers

Edwards offers point-of-use water absorption scrubbers. Systems are suitable for the treatment of exhaust streams containing water-soluble and water-reactive gases.

Plasma Exhaust Management Systems

Plasma Exhaust Management Systems

Innovative plasma exhaust management solutions specifically designed for both the CVD and etch markets. High performance abatement for a wide range of process gas flows within semiconductor and solar industries.

Exhaust Pipe Heating

Exhaust Pipe Heating

Edwards offers (Temperature Management System) for processes involving condensable solids. TMS ensures that these compounds remain volatile until they enter abatement device. The TMS is designed to heat both forelines and pump exhaust lines to the inlet of the abatement device. Moulded high surface area heaters maximize contact with pipes and are designed to maintain the temperature of the pipe between 90° and 150°C.

Exhaust Conditioning

Exhaust Conditioning

Edwards range of exhaust conditioning products includes the Pyrophoric Conditioning System (PCS) for the self oxidation of silane, the Water Cooled Exhaust Trap (WCT) for LPCVD nitride processes and the Wet Electrostatic Precipitator (WESP) for additional powder removal.