Edwards have pioneered the use of dry vacuum pumps in some of the most harsh applications. With over 10 years experience and more than 60,000 Drystar pumps installed world-wide, this technology now becomes available to the industrial user.
 
Our GV Drystar pumps are a new series of dry vacuum pumps designed to perform reliably and economically in a range of demanding industrial applications. The GV pumps have displacements from 91.5 m³h^-1 to 793 m³h^-1.

Our range of EXT compound turbo molecular pumps and TIC Controllers use state-of-the-art technology to provide reliable, high and ultra high vacuum.

The Barocel Pressure / Vacuum Transducers provide high accuracy, high stability, gas independent pressure measurement making them ideal for a wide range of industrial process, research and calibration applications. Incorporation of a hermetically sealed and heated enclosure containing the pressure sensing element and critical electronic circuitry means changes in environmental conditions have a minimal effect on readings. In addition, the Inconel and Monel construction allows for use with corrosive processes.

Our newly designed family of coaters offer solutions to processing requirements that range from small scale R&D or preproduction applications to large scale, high volume production fabrication lines. Ideal for either lift off or step coverage processes, these cleanroom compatible systems accept a multitude of accessories to meet almost any requirement.
In addition, our coaters are designed to optimize flexibility and efficiency in installation as well as operation. Fully automated processing via the Temescal control system maximizes throughput as well as ease of use. The PLC Based TCS provides fully integrated process and vacuum control, recipe driven pump to vent processing with datalogging, and automated pump, vent, and regeneration cycles that run independently of recipe processing.

Temescal offers a wide range of guns, for various process applications. Single pocket, multi-pocket turret guns, PopTop turret guns plus accessories like crucible liners, wire feeders, and feedthrough kits.

These accessories are to be used with Temescal Electron Beam Guns.

Die magnetgelagerten Turbomolekularpumpen der Baureihe STP sind die erste Wahl bei Anwendungen, die ein ausfallsicheres und kohlenwasserstofffreies Pumpen erfordern. Der Rotor wird beim Betrieb von einem magnetischen Lagersystem mit mehreren Achsen gehalten. Damit wird das Verunreinigungsrisiko gesenkt, und Vibrationen, Lärmentwicklung und Wartungsaufwand werden verringert. Die Pumpen der Baureihe STP können für den Einsatz in zahlreichen Anwendungen und Prozessen vollständig mit erweiterten Controllern gesteuert werden.

Temescal offer 6, 12 and 15 kW e-beam power supplies with super fast arc recovery.

Temescal offer a variety of Desposition Controllers for closed loop control over one or more single or multipocket e-beam guns. Temescal Desposition Controllers are available in a number of configurations to suit specific applications.

Temescal System Accessories have been designed to support all Temescal Desposition Systems. System Accessories range from crucible liners to substrate heaters.

Temescal offer various Domes and Planets for use with all Temescal Desposition Systems including Lift-off, conformal coverage, variable angle and flip tolling.

The Edwards SN booster pumps provide high throughput pumps for industrial and arduous chemical applications. Utilizing reliable, rugged designs, these pumps offer a low cost, space saving pumping systems.

The Edwards pHMB Proximity Booster Pumps are water-cooled, positive displacement roots pumps designed specifically for load lock applications in the semiconductor industry. These pumps are driven by an inverter and are controlled by a suitable backing pump.

Edwards has ceased the manufacture and global supply of its Auto 306, Auto 500, TF 600, Scancoat and Identicoat ranges of vacuum coating systems effective at the end of December 2008.

Continued Service and Support

We are dedicated to continued service and support for our customers. If you currently own a Edwards Vacuum Coating System, spares and service will continue to be provided. Please contact your local Edwards facility for more information about service support.

Edwards has ceased the manufacture and global supply of its Spectron 300E, Spectron 5000 and QLD ranges of leak detectors effective at the end of October 2004. The Spectron 600 range has been discontinued as of January 2007.

We are dedicated to continued service and support for our customers. If you currently own a Edwards Spectron leak detector, spares and service will continue to be provided for the Spectron 300E, Spectron 600 series, Spectron 5000 series and QLD leak detectors. Please contact your local Edwards facility for more information about service support.