Edwards Enables: Solar Power

Manufacturing renewable forms of energy without damaging the environment is vital for future generations. Edwards abatement systems capture and destroy damaging gases used in the making of Photovoltaic solar cells.

EPX on-tool High Vacuum Pumps

The Edwards EPX high vacuum dry pumps offer on-tool pumping in a lighter and smaller package, requiring only 1.4 kW of power. Using a unique, patented, single-shaft regenerative/Holweck® stage mechanism, EPX series pumps are capable of pumping from atmosphere to ultimate pressures with no risk of process contamination.

400V, 3/8 water connector

208V No TIM 3/8 water connector

208V SPI TIM 3/8 water connector

208V SPI TIM 3/8 water connector

208V No TIM 3/8 water connector

208V SPI TIM 3/8 water connector

EPX500N Dry pump 208V SPI TIM 3/8 water connector

EPX500NE 208V No TIM 1/4 water connector