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Manufacturing renewable forms of energy without damaging the environment is vital for future generations. Edwards abatement systems capture and destroy damaging gases used in the making of Photovoltaic solar cells.
The Edwards EPX high vacuum dry pumps offer on-tool pumping in a lighter and smaller package, requiring only 1.4 kW of power. Using a unique, patented, single-shaft regenerative/Holweck® stage mechanism, EPX series pumps are capable of pumping from atmosphere to ultimate pressures with no risk of process contamination.
400V, 3/8 water connector
208V No TIM 3/8 water connector
208V SPI TIM 3/8 water connector
EPX500N Dry pump 208V SPI TIM 3/8 water connector
EPX500NE 208V No TIM 1/4 water connector
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