Solid State Technology: Edwards Launches New Vacuum Pump for LED and Compound Semiconductor Manufacturing

Edwards, a manufacturer of vacuum products and abatement systems and a provider of related value-added services, introduced the new iXH645H dry pump.

According to the company, the new pump has been optimized for MOCVD processes used in LED manufacturing, as well as for compound semiconductor manufacturing using III-V materials in gate stacks. Edwards said that visitors to InterSolar, taking place July 10-12, in San Francisco, Calif., can learn more about the iXL Series.

The iXH645H delivers very high gas flow capability and is able to operate continuously at the high loads required for the latest-generation LED manufacturing tools. The technology of the iXH pump minimizes maintenance requirements and maximizes pump uptimes, helping to lower cost-of-ownership.

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