World Industry News Online: Edwards new iXH500H dry pump series delivers significant reduction in cost-of-ownership

Edwards Limited, a leading global supplier of vacuum and abatement equipment and services, has expanded its popular iXH family of harsh process dry pumps with the introduction of the iXH500H series. This new series of 500m3/h pumps has been optimised for flat panel, solar and advanced semiconductor processes requiring high gas flows and flexible pump temperature profiles. These pumps offer significant cost of ownership benefits, resulting from lower energy consumption and enhanced mean time between servicing (MTBS), while delivering the small footprint and hydrogen pumping capabilities of the iXH450 series.

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